Specialty Gas
C3F6 / Hexafluoropropene / PFC-1216 / Electronic gas
Hexafluoropropene (PFC-1216) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
C3F6 Molecular Structure
· Production Description
· Packaging Information: 10.2L Cylinder
| Items | Specification |
| Chemical name | Hexafluoropropene Perfluoropropene, HFP, PFC-1216 |
| CAS No. | 116-15-4 |
| Molecular formula | C3F6 |
| Molecular weight | 150.02 |
| Boiling point (101.325kPa, ℃) | -29 |
| Vapor Pressure (27℃, kPa) | 788.16 |
| Density (-40℃, g/cm3) | 1.58 |
| Purity | ≥99.0% |