Specialty Gas
CF4 / CARBON TETRAFLUORIDE / Electronic gas
showing high performance for critical plasma etching in semiconductor devices manufacturing
CF4 Molecular Structure
· Production Description
· Packaging Information: 4.64L/10.2L/44L Cylinder
| Attributes | Values |
| Formula | CF4 |
| Molecular Weight (lb/mol) | 88.00 |
| Critical Temp. (°F) | -50.2 |
| Critical Pressure (psia) | 543.6 |
| Boiling Point (°F) | -198.5 |
| Melting Point (°F) | -298.5 |
| Psat @ 70°F (psia) | (note 1) |
| Liquid Density @ 70°F (lb/ft3) | (note 2) |
| Gas Density @ 70°F 1 atm (lb/ft3) | 0.2285 |
| Specific Volume @ 70°F 1 atm (ft3/lb) | 4.38 |
| Specific Gravity | 3.104 |
| Specific Heat @ 70°F (Btu/lbmol-°F) | 14.43 |
· Notes
Note 1. = Signifies at 70°F, the compound is above its critical temperature.
Note 2. = Signifies that at 70°F,
the compound is below the normal boiling
point and only the equilibrium vapor is present at 1 atmosphere.